Development and Integration of MEMS environment sensors towards smart and more-than-Moore era
The environmental information is very important to the human life, the proposed technologies of Environment Sensing Hub including:
(1)Air sensing hub: temperature sensor, humidity sensor, pressure sensor, infrared sensor, noise sensor (microphone), PM 2.5 sensor
(2)Water sensing hub: heavy metal ion sensor, spectrochipAir sensing hub: The autonomous development technology of the H/T/P sensors which could be implemented by the CMOS-MEMS processes sensors can be established; the novel PM 2.5 sensor has the benefits of compact size and high resolution. Water sensing hub: Novel ISHEMT sensor has high sensitivity to detect the heavy metal ion in water; novel spectrochip has the mass-fabrication capability and compact sensing system.Different using situations can be fitted by selecting the different required environmental sensors in our proposed environment sensing hub. By the integration of the distinct analyzed information and the comparison of the data by different users/conditions, it can be further utilized in Smart-X fields; hence, the air/water qualities can be monitored to improve the quality of human life.
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